集成电路固有失效机理的可靠性评价综述OACSTPCD

The reliability of ULSI/VLSI integrated circuit chips is related to both design and process.In order to make the chip of ULSI/VLSI operate stably during a specific lifetime,it is necessary to evaluate the inherent failure mechanism that affects the reliability of chips.The purpose of the evaluation is to determine the mechanism of technical wear and ensure that the chip has good reliability throughout the product life by improving the design and process processing level.This paper reviews the reliability evaluation standards of inherent failure mechanisms at home and abroad,expounds these inherent mechanisms,summarizes the experiment methods of dif-ferent inherent failure mechanisms,and puts forward the reliability evaluation requirements of inherent failure mechanisms.The relia-bility evaluation of failure mechanisms play a role in process development,library construction and engineering services,and will pro-mote the development of domestic qualitied manufacturer certification.