集成电路与嵌入式系统2024，Vol.24Issue(7)：1-11,11.
集成电路固有失效机理的可靠性评价综述
Review on the reliability evaluation of inherent failure mechanism of integrated circuits
章晓文 1周斌 1牛皓 1林晓玲1
作者信息
- 1. 工业和信息化部电子第五研究所电子元器件可靠性物理及其应用技术重点实验室,广州 650500
- 折叠
摘要
Abstract
The reliability of ULSI/VLSI integrated circuit chips is related to both design and process.In order to make the chip of ULSI/VLSI operate stably during a specific lifetime,it is necessary to evaluate the inherent failure mechanism that affects the reliability of chips.The purpose of the evaluation is to determine the mechanism of technical wear and ensure that the chip has good reliability throughout the product life by improving the design and process processing level.This paper reviews the reliability evaluation standards of inherent failure mechanisms at home and abroad,expounds these inherent mechanisms,summarizes the experiment methods of dif-ferent inherent failure mechanisms,and puts forward the reliability evaluation requirements of inherent failure mechanisms.The relia-bility evaluation of failure mechanisms play a role in process development,library construction and engineering services,and will pro-mote the development of domestic qualitied manufacturer certification.关键词
ULSI/VLSI集成电路芯片/固有失效机理/可靠性评价标准/可靠性试验方法Key words
VLSI/ULSI chip/inherent failure mechanism/reliability experiment standard分类
信息技术与安全科学引用本文复制引用
章晓文,周斌,牛皓,林晓玲..集成电路固有失效机理的可靠性评价综述[J].集成电路与嵌入式系统,2024,24(7):1-11,11.
