测试技术学报2024，Vol.38Issue(3)：330-336,7.DOI:10.3969/j.issn.1671-7449.2024042
压电MEMS振动传感器调理电路设计与实现
Design and Implementation of Conditioning Circuit for Piezoelectric MEMS Vibration Sensor
摘要
Abstract
A signal conditioning circuit based on TLE 2064 CDR is designed to solve the problem of the output charge signal of a piezoelectric MEMS vibration sensor with lithium niobate single crystal film being weak and difficult to collect.The circuit is composed of a charge-voltage conversion circuit(Q-V),a voltage amplification circuit,a pre-low-pass filter circuit and a post-high-pass filter circuit for the acquisi-tion of weak signals.In addition,the piezoelectric MEMS vibration sensor is tested by the standard charge amplifier and the signal conditioning circuit designed in this paper.The test results show that the designed signal conditioning circuit has a good agreement with the output of the standard charge amplifier,and can meet the wide input charge acquisition from 5～130 pC.When the loading acceleration range is 5～20 g,the linearity between the output charge and the input acceleration is good.When the input accel-eration is 5 g and the operating frequency range is 50～2 000 Hz,the output charge deviation is controlled within±1.6 pC,which has a good consistency.In summary,the circuit has the characteristics of high integration and good sensitivity,and has a good application prospect in weak signal acquisition.关键词
压电MEMS振动传感器/调理电路/滤波设计/信号放大/电荷放大器Key words
piezoelectric MEMS vibration sensor/conditioning circuit/filter design/signal amplification/charge amplifier分类
信息技术与安全科学引用本文复制引用
武晓慧,张慧毅,耿文平,郭涛,丑修建..压电MEMS振动传感器调理电路设计与实现[J].测试技术学报,2024,38(3):330-336,7.基金项目
国家自然科学基金资助项目(51975541,62171415) （51975541,62171415）
山西省基础研究计划项目(202203021223005) （202203021223005）
山西省留学归国人员科学活动基金资助项目(20230015) （20230015）
