舰船电子工程2024，Vol.44Issue(4)：131-135,5.DOI:10.3969/j.issn.1672-9730.2024.04.028
热电堆式MEMS气体流量传感器设计及性能研究
Design and Performance Study of Thermopile-based MEMS Gas Flow Sensor
摘要
Abstract
A thermal MEMS gas flow sensor consisting of a microheater and a thermopile is proposed to achieve highly sensi-tive,fast response and low power consumption for gas flow measurement.The thermopile structure uses N/P type heavily doped poly-silicon to construct a double stacked structure,which can achieve low thermal conductivity and high seeebeck coefficient with high-er temperature sensitivity.Experimental tests show that the sensor device has a sensitivity of 0.309 mV/sccm(i.e.,58.22 mV/ms-1)in the airflow range of 0～1000 sccm,a response time of only about 139 ms,and a microheater heating power consumption of only 34.9 mW at an operating voltage of 2.56 V.The overall size of the sensor is only 1300 mm×1300 mm,which is conducive to the min-iaturization and integration of the detection system.Application value in flow rate flow detection scenarios such as ship and land vehi-cle powered hydrogen fuel cells,medical assisted breathing equipment.关键词
热电堆/MEMS/双层堆叠结构/热式气体流量传感器Key words
thermopile/MEMS/double stacked structure/thermal gas flow sensor分类
信息技术与安全科学引用本文复制引用
刘泽民,张琛琛,毛海央,周娜..热电堆式MEMS气体流量传感器设计及性能研究[J].舰船电子工程,2024,44(4):131-135,5.基金项目
国家自然科学基金项目(编号:62201567)资助. （编号:62201567）
