强激光与粒子束2024，Vol.36Issue(8)：1-8,8.DOI:10.11884/HPLPB202436.240081
空间整形飞秒激光高效制备纳米光栅
Research on efficient fabrication of nanogratings by space shaping femtosecond laser
摘要
Abstract
Aiming at the difficulty of fabricating large-area nanograting structures with femtosecond laser in one step,the direct writing method of femtosecond laser pulse using slit-spatial shaping is proposed in this paper.By conducting a study on the parameter dependence of nanograting structures on the single-crystal silicon surface with the processing system,the optimized conditions of incident shaping femtosecond laser—energy density of 8.00 μJ/cm2,scanning speed of 9 mm/s,and slit width of 0.40 mm—are obtained.By using SEM,AFM and other microscopic characterization methods,it is indicated that the fabricated nanograting structure has an extremely high width(41.20 μm),greatly improving the fabrication efficiency of large-area nanograting structures in one step.This study provides a certain reference for the current research on efficiency optimizing and performance enhancing of femtosecond laser direct writing systems.关键词
飞秒激光直写/空间整形/纳米光栅/纵横比Key words
femtosecond laser direct writing/spatial shaping/nanograting structures/length-width ratio分类
数理科学引用本文复制引用
赵昶栋,刘永刚,魏文卿,张航,邓琥,刘泉澄,胡建波,尚丽平,李占锋..空间整形飞秒激光高效制备纳米光栅[J].强激光与粒子束,2024,36(8):1-8,8.基金项目
国家自然科学基金项目(11872058) （11872058）
中物院创新发展基金项目(CX20210025) （CX20210025）
