应用数学和力学2024，Vol.45Issue(6)：775-786,12.DOI:10.21656/1000-0887.450063
高灵敏度柔性多层等强度梁式力/位移传感器设计及传感理论研究
Design and Sensing Theory for Flexible Multi-Layer Equal Strength Beam Force/Displacement Sensors With High Sensitivity
摘要
Abstract
An equal-strength cantilever beam sensor based on the multi-layer ionic skin(flexible capacitance sensor chips)was designed and prepared,to solve the problem that most existing thin-film-structure flexible sensors cannot simultaneously measure concentrated normal forces and displacements.The proposed sensor is comprised of the multi-layer ionic skin and the equal-strength cantilever beam.The normal contact forces or displacements can be acquired through measurement of the capacitance change of the sensor,with the free end of the beam contacting the measured object.A theoretical sensing model of the relationship between capaci-tance change and force/displacement was established and then verified through displacement/force loading tests.The test results show that,the sensing model is in good agreement with the test data.For the measure-ment of force and displacement,the sensitivity of the sensor with a 4-layer structure is 1.855 mN/pF and 0.694 mm/pF,respectively.The minimum measurable force is 0.02 mN and the minimum measurable displacement is 0.01 mm.At the same time,the sensor shows good linearity(R2=0.994).This sensing model provides a theo-retical basis for the design of such sensors with good application prospects in the fields of flexible machines and medical health detection.关键词
柔性传感器/等强度悬臂梁/位移/力Key words
flexible sensor/equal strength cantilever beam/displacement/force分类
计算机与自动化引用本文复制引用
倪娜,叶智鹏,李东波,赵冬..高灵敏度柔性多层等强度梁式力/位移传感器设计及传感理论研究[J].应用数学和力学,2024,45(6):775-786,12.基金项目
陕西省自然科学基础研究计划(面上项目)(2023-JC-YB-059 （面上项目）
2023-JC-YB-060) （）
