高灵敏度柔性多层等强度梁式力/位移传感器设计及传感理论研究OA北大核心CSTPCD

An equal-strength cantilever beam sensor based on the multi-layer ionic skin(flexible capacitance sensor chips)was designed and prepared,to solve the problem that most existing thin-film-structure flexible sensors cannot simultaneously measure concentrated normal forces and displacements.The proposed sensor is comprised of the multi-layer ionic skin and the equal-strength cantilever beam.The normal contact forces or displacements can be acquired through measurement of the capacitance change of the sensor,with the free end of the beam contacting the measured object.A theoretical sensing model of the relationship between capaci-tance change and force/displacement was established and then verified through displacement/force loading tests.The test results show that,the sensing model is in good agreement with the test data.For the measure-ment of force and displacement,the sensitivity of the sensor with a 4-layer structure is 1.855 mN/pF and 0.694 mm/pF,respectively.The minimum measurable force is 0.02 mN and the minimum measurable displacement is 0.01 mm.At the same time,the sensor shows good linearity(R2=0.994).This sensing model provides a theo-retical basis for the design of such sensors with good application prospects in the fields of flexible machines and medical health detection.