集成可编程光芯片的研究与功能验证OA北大核心CSTPCD

With the increasing demand for high-speed,ultra-compact data signal management,photonics integrated circuits(PIC)have attracted extensive attention in advanced photonic signal processing.Programmable photonic chips are gradually becoming favored by developers for their inherent generic and reconfigurable features.Based on United Micro-electronics Center Co.,Ltd(CUMEC)silicon-on-insulator(SOI)integrated photonics platform,we have designed and fabri-cated a 3×3 hexagon-shape programmable photonic chip containing 9 hexagon units.The optical switch's extinction ratio of up to 30 dB was achieved by the"Iteration Scanning Method",and there is a 21%chip size reduction through"Flatting"layout optimization.The typical functions of this programmable chip are further verified by tuning the input/output cou-pling coefficients of tunable basic unit(TBU).This allows for a Mach-Zehnder interferometer(MZI)or a micro-ring reso-nator(ORR)with a tunable extinction ratio,resonance wavelength and free spectra range to be realized,and the correspond-ing extinction ratio can reach 42.3 dB and 28 dB,respectively.Other functions,such as an optical delay line with a wide tunable range,as well as routing between any input and output ports,are also successfully realized with this programmable photonic chip.This is the largest scale hexagon-shape programmable chip which could be integrated with active devices.This chip offers a wide range of potential applications,in the areas of microwave photonics signal processing,bio-chemical sensing,quantum information and optical computing.