光学精密工程2024，Vol.32Issue(11)：1639-1652,14.DOI:10.37188/OPE.20243211.1639
激光跟踪仪几何结构误差标定及修正
Calibration and correction of geometric errors in laser tracker
摘要
Abstract
To enhance the coordinate measurement accuracy of laser trackers,we analyzed the geometric errors of the device and studied calibration and correction methods for transit offset error,transit tilt error,laser offset error,and laser tilt error.First,geometric error models were established using geometric analy-sis methods.A calibration device for geometric error parameters was constructed based on a telecentric measurement system,test rods and a PSD device.This setup allows for rapid,automatic high-precision calibration and compensation of geometric errors.Subsequently,the geometric errors measured by the cali-bration experiment were incorporated into the error compensation models,and the scale bar length mea-sured by the laser tracker was compared with its standard length.Experimental results indicate that after geometric error correction,the coordinate measurement error of the laser tracker can be reduced from 13 μm/m to less than 4 μm/m,improving measurement accuracy by approximately 9 μm/m.These findings confirm the validity of the geometric error calibration and correction methods,demonstrating that coordi-nate measurement accuracy of laser trackers can be significantly enhanced using these methods.关键词
激光跟踪仪/几何结构误差/误差标定/误差修正/最小二乘法Key words
laser tracker/geometric errors/error calibration/error correction/least square method分类
计算机与自动化引用本文复制引用
王珊,张滋黎,董登峰,周维虎,纪荣祎,潘映伶,王国名,崔成君..激光跟踪仪几何结构误差标定及修正[J].光学精密工程,2024,32(11):1639-1652,14.基金项目
工业和信息化部高质量专项(No.TC220505T) （No.TC220505T）
