多足式微型直线超声电机定子的设计与仿真OA北大核心CSTPCD

To meet the application requirements of narrow spaces,low voltage,and high driving force,a multi-legged linear miniature ultrasonic motor based on a single bending vibration mode was proposed.Firstly,the stator structure was designed according to the driving principle of the ultrasonic motor.Using the finite element software ANSYS Workbench,a dynamic simulation model of the stator was estab-lished,followed by structural optimization and dynamic analysis.The final dimensions of the stator were determined to be 8 mm×1 mm×0.6 mm,with measured resonant frequency errors of 6.99%and 5.46%,respectively.Finally,a nonlinear simulation contact model between the stator and mover of the motor was created to verify the feasibility of the bidirectional drive of the ultrasonic motor.A driving performance test device for the micro linear ultrasonic motor was constructed.The measured results indicated that with a driving voltage of 60 Vpp,the maximum no-load speed was 53.3 mm/s,the maximum load was 43.3 mN,and the thrust-to-weight ratio was 280.Experimental results demonstrate that the micro ultrasonic motor has a viable principle,a simple and compact structure,and good output performance,suggesting broad application prospects in precision drive fields such as optical systems,precision positioning systems,and mobile terminals.