Embedded high-quality ternary GaAs1-xSbx quantum dots in GaAs nanowires by molecular-beam epitaxyOACSTPCDEI
Embedded high-quality ternary GaAs1-xSbx quantum dots in GaAs nanowires by molecular-beam epitaxy
Semiconductor quantum dots are promising candidates for preparing high-performance single photon sources.A basic requirement for this application is realizing the controlled growth of high-quality semiconductor quantum dots.Here,we report the growth of embedded GaAs1-xSbx quantum dots in GaAs nanowires by molecular-beam epitaxy.It is found that the size of the GaAs1-xSbx quantum dot can be well-defined by the GaAs nanowire.Energy dispersive spectroscopy analyses show that the antimony content x can be up to 0.36 by tuning the growth temperature.All GaAs1-xSbx quantum dots exhibit a pure zinc-blende phase.In addition,we have developed a new technology to grow GaAs passivation layers on the sidewalls of the GaAs1-xSbx quantum dots.Different from the traditional growth process of the passivation layer,GaAs passivation layers can be grown simultaneously with the growth of the embedded GaAs1-xSbx quantum dots.The spontaneous GaAs passivation layer shows a pure zinc-blende phase due to the strict epitaxial relationship between the quantum dot and the passivation layer.The successful fabrication of embedded high-quality GaAs1-xSbx quantum dots lays the foundation for the realization of GaAs1-xSbx-based single photon sources.
Xiyu Hou;Lianjun Wen;Fengyue He;Ran Zhuo;Lei Liu;Hailong Wang;Qing Zhong;Dong Pan;Jianhua Zhao
State Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||College of Materials Science and Opto-Electronic Technology,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
semiconductorquantum dotnanowireGaAs1-xSbxmolecular-beam epitaxy
《半导体学报(英文版)》 2024 (008)
20-27 / 8
This work was supported by the National Natural Sci-ence Foundation of China(Grant No.12374459)and the Strate-gic Priority Research Program of Chinese Academy of Sci-ences(Grant No.XDB0460000).D.P.acknowledges the sup-port from Youth Innovation Promotion Association,Chinese Academy of Sciences(Grant Nos.2017156 and Y2021043).
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