A 128×128 SPAD LiDAR sensor with column-parallel 25 ps resolution TA-ADCsOACSTPCDEI

作者：Na Tian;Zhe Wang;Kai Ma;Xu Yang;Nan Qi;Jian Liu;Nanjian Wu;Runjiang Dou;Liyuan Liu

作者单位：State Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100049,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100049,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100049,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100049,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100049,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100049,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaState Key Laboratory of Superlattices and Microstructures,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100049,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China

中文关键词：3D imagingCMOS imagersdirect time-of-flight(dTOF)time-to-analog converter(TAC)

英文关键词：3D imagingCMOS imagersdirect time-of-flight(dTOF)time-to-analog converter(TAC)

刊名：《半导体学报（英文版）》 2024 (8)

页码/页数：38-45,8

基金：This work is supported by National Science and Technol-ogy Major Project(Grant No.2021ZD0109801)in part by the Beijing Municipal Science and Technology Project(Grant No.Z221100007722028)in part by the National Natural Science Foundation of China(Grant No.62334008).

DOI：10.1088/1674-4926/24030019