A mechanically coupled MEMS filter with high-Q width extensional mode resonatorsOACSTPCDEI
A mechanically coupled MEMS filter with high-Q width extensional mode resonators
Wei Wang;Wenli Liu;Junyuan Zhao;Bo Niu;Zeyu Wu;Yinfang Zhu;Jinling Yang;Fuhua Yang
Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaInstitute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaInstitute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaInstitute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaInstitute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaInstitute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaInstitute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaInstitute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
MEMSnarrowband filtermechanically couplingquality factorwidth extensional mode
MEMSnarrowband filtermechanically couplingquality factorwidth extensional mode
《半导体学报（英文版）》 2024 (8)
46-54,9
This work was supported by the National Natural Science Foundation of China(61734007)and National Key Research and Development Program of China(2022YFF0706100).
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