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A mechanically coupled MEMS filter with high-Q width extensional mode resonators

Wei Wang Wenli Liu Junyuan Zhao Bo Niu Zeyu Wu Yinfang Zhu Jinling Yang Fuhua Yang

半导体学报（英文版）2024，Vol.45Issue(8)：46-54,9.

半导体学报（英文版）2024，Vol.45Issue(8)：46-54,9.DOI:10.1088/1674-4926/24050007

A mechanically coupled MEMS filter with high-Q width extensional mode resonators

Wei Wang ¹Wenli Liu ¹Junyuan Zhao ¹Bo Niu ¹Zeyu Wu ¹Yinfang Zhu ¹Jinling Yang ¹Fuhua Yang¹

作者信息

1. Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
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摘要

关键词

MEMS/narrowband filter/mechanically coupling/quality factor/width extensional mode

Key words

MEMS/narrowband filter/mechanically coupling/quality factor/width extensional mode

引用本文复制引用

Wei Wang,Wenli Liu,Junyuan Zhao,Bo Niu,Zeyu Wu,Yinfang Zhu,Jinling Yang,Fuhua Yang..A mechanically coupled MEMS filter with high-Q width extensional mode resonators[J].半导体学报（英文版）,2024,45(8):46-54,9.

基金项目

This work was supported by the National Natural Science Foundation of China(61734007)and National Key Research and Development Program of China(2022YFF0706100). （61734007）

半导体学报（英文版）

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ISSN：1674-4926

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