光通信技术2024，Vol.48Issue(4)：54-57,4.DOI:10.13921/j.cnki.issn1002-5561.2024.04.010
基于X切薄膜铌酸锂的4×4 MMI耦合器的设计和制造
Design and fabrication of a 4×4 MMI coupler based on X-cut thin-film lithium niobate
摘要
Abstract
Aiming at the problems of large size,high insertion loss,and complex process of multi-mode interference(MMI)cou-pler,a 4×4 MMI coupler based on transverse electric(TE)mode is designed on the platform of X-cut thin-film lithium niobate(X-cut TFLN).The length and width of the MMI region are simulated and optimized using the three-dimensional finite-differ-ence time-domain(FDTD)method.Finally,a 4×4 MMI coupler is manufactured on the platform using inductive coupled plasma(ICP)etching method according to the optimization results.The simulation results show that the total insertion loss of the opti-mized 4×4 MMI coupler is 0.36 dB,and the actual measured insertion loss is 0.78 dB.关键词
薄膜铌酸锂/多模干涉耦合器/光子集成/低插入损耗/电感耦合等离子体刻蚀Key words
thin-film lithium niobate/multi-mode interference couplers/photonic integration/low loss/inductive coupled plasma etching分类
信息技术与安全科学引用本文复制引用
邓冶,李坚平,张振荣..基于X切薄膜铌酸锂的4×4 MMI耦合器的设计和制造[J].光通信技术,2024,48(4):54-57,4.基金项目
广西科学基金重点项目(批准号:2021GXNSFDA076001)资助 （批准号:2021GXNSFDA076001）
广西创新驱动发展专项(批准号:桂科 AA21077021)资助. （批准号:桂科 AA21077021）
