航空科学技术2024，Vol.35Issue(7)：56-64,9.DOI:10.19452/j.issn1007-5453.2024.07.006
激光烧蚀反应烧结碳化硅表面形貌特征及亚表面损伤研究
Study on Surface Characteristics and Subsurface Damage of RB-SiC/Si by Laser Ablation
摘要
Abstract
RB-SiC/Si has the advantages of high specific stiffness,good chemical stability,low thermal expansion coefficient and wear resistance,etc.Therefore,it is widely applied in large aperture space telescopes,satellite remote sensing,aviation engine components,and so on.However,the material characteristics of high strength and hardness also make it difficult to be machined.Characterized of high energy density,Laser processing is suitable for hard and brittle materials but it always leads to surface thermal damage.In this paper,the influence of laser parameters on the surface characteristics of RB-SiC/Si was investigated,and the interaction between the nanosecond laser pulse and RB-SiC/Si was analyzed.The high-temperature oxidation process and the oxidation product were identified.The subsurface damage of the laser ablated single groove and groove groups were investigated and compared by angle polishing to achieve the dependence on the laser processing parameters.The achieved results can provide certain theoretical and technical support for precision machining of RB-SiC/Si with low surface and subsurface damage.关键词
纳秒脉冲激光/RB-SiC/Si/材料去除机理/表面特征/亚表面损伤Key words
nanosecond pulsed laser/RB-SiC/Si/material removal mechanism/surface characteristic/subsurface damage分类
航空航天引用本文复制引用
张全利,刘建,孙智源,吴明涛,蔡毅斌,曾加恒,金锃阳,傅玉灿..激光烧蚀反应烧结碳化硅表面形貌特征及亚表面损伤研究[J].航空科学技术,2024,35(7):56-64,9.基金项目
国家自然科学基金(52175412,52005461) （52175412,52005461）
航空科学基金(2019ZE052014) National Natural Science Foundation of China(52175412,52005461) （2019ZE052014）
Aeronautical Science Foundation of China(2019ZE052014) （2019ZE052014）
