红外与毫米波学报2024，Vol.43Issue(3)：307-315,9.DOI:10.11972/j.issn.1001-9014.2024.03.003
改进碲镉汞液相外延方法原位生长正组分梯度薄膜材料
Improved liquid phase epitaxy method for in-situ growth of HgCdTe with positive composition gradient
摘要
Abstract
The influence of growth conditions of liquid phase epitaxy on the composition gradient of HgCdTe was stud-ied,and the growth model of liquid phase epitaxy(LPE)of HgCdTe was established.HgCdTe with positive composi-tion gradient was grown by slider liquid phase epitaxy by changing the mercury loss rate.The positive composition gra-dient structure of HgCdTe grown under the growth condition of specific mercury loss was confirmed by corrosion thin-ning spectrum and secondary ion mass spectrometry(SIMS).The experimental results show that the HgCdTe with posi-tive composition gradient had the similar surface morphology and infrared transmission spectrum curve to the traditional HgCdTe with negative composition gradient.It had high crystal quality,with a full width at half maximum(FWHM)of X-ray diffraction(XRD)double-crystal rocking curve of 28.8 arcsec.关键词
碲镉汞/液相外延/组分梯度/二次离子质谱Key words
Hg1-xCdxTe/LPE/composition gradient/SIMS分类
信息技术与安全科学引用本文复制引用
霍勤,李向阳,韩红强,张诚,焦翠灵,王仍,毛铖铭,陆液,陈心恬,乔辉..改进碲镉汞液相外延方法原位生长正组分梯度薄膜材料[J].红外与毫米波学报,2024,43(3):307-315,9.基金项目
国家自然科学基金国家重大科研仪器研制项目(12227901) Supported by the National Natural Science Foundation of China(12227901) （12227901）
