改进碲镉汞液相外延方法原位生长正组分梯度薄膜材料OA北大核心CSTPCD

The influence of growth conditions of liquid phase epitaxy on the composition gradient of HgCdTe was stud-ied,and the growth model of liquid phase epitaxy(LPE)of HgCdTe was established.HgCdTe with positive composi-tion gradient was grown by slider liquid phase epitaxy by changing the mercury loss rate.The positive composition gra-dient structure of HgCdTe grown under the growth condition of specific mercury loss was confirmed by corrosion thin-ning spectrum and secondary ion mass spectrometry(SIMS).The experimental results show that the HgCdTe with posi-tive composition gradient had the similar surface morphology and infrared transmission spectrum curve to the traditional HgCdTe with negative composition gradient.It had high crystal quality,with a full width at half maximum(FWHM)of X-ray diffraction(XRD)double-crystal rocking curve of 28.8 arcsec.