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电流增益截止频率为441 GHz的InGaAs/InAlAs InP HEMT

封瑞泽 曹书睿 冯识谕 周福贵 刘同 苏永波 金智

红外与毫米波学报2024,Vol.43Issue(3):331-335,5.
红外与毫米波学报2024,Vol.43Issue(3):331-335,5.DOI:10.11972/j.issn.1001-9014.2024.03.006

电流增益截止频率为441 GHz的InGaAs/InAlAs InP HEMT

InGaAs/InAlAs InP-based HEMT with the current cutoff frequency of 441 GHz

封瑞泽 1曹书睿 1冯识谕 1周福贵 1刘同 2苏永波 1金智1

作者信息

  • 1. 中国科学院微电子研究所,高频高压器件与集成电路研究中心,北京 100029||中国科学院大学集成电路学院,北京 100049
  • 2. 中国科学院微电子研究所,高频高压器件与集成电路研究中心,北京 100029
  • 折叠

摘要

Abstract

In this letter,an In0.53Ga0.47As/In0.52Al0.48As InP-based HEMT with fT>400 GHz was designed and fabri-cated successfully.A narrow gate recess technology was used to optimize the parasitic resistances.The gate length is 54.4 nm,and the gate width is 2×50 μm.The maximum drain current IDS.max is 957 mA/mm,and the maximum transconductance gm.max is 1 265 mS/mm.The current gain cutoff frequency fT is as high as 441 GHz and the maximum oscillation frequency fmax reaches 299 GHz,even at a relatively small value of VDS=0.7 V.The re-ported device can be applied to terahertz monolithic integrated amplifiers and other circuits.

关键词

铟磷高电子迁移率晶体管(InP HEMTs)/InGaAs/InAlAs/电流增益截止频率(fT)/最大振荡频率(fmax)/栅槽

Key words

InP HEMTs/InGaAs/InAlAs/current gain cutoff frequency(fT)/maximum oscillation frequency(fmax)/gate recess

分类

信息技术与安全科学

引用本文复制引用

封瑞泽,曹书睿,冯识谕,周福贵,刘同,苏永波,金智..电流增益截止频率为441 GHz的InGaAs/InAlAs InP HEMT[J].红外与毫米波学报,2024,43(3):331-335,5.

基金项目

Supported by The National Natural Science Foundation of China(61434006) (61434006)

红外与毫米波学报

OA北大核心CSTPCD

1001-9014

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