机电工程技术2024，Vol.53Issue(7)：34-40,7.DOI:10.3969/j.issn.1009-9492.2024.07.007
压电驱动在超精密加工领域的应用现状与发展趋势综述
Review of Application Status and Development Trend of Piezoelectric Drive in Ultra-precision Machining
摘要
Abstract
In the field of ultra-precision machining,to realize micro/nano level machining precision,it is necessary to provide higher precision drive device and control technology.Piezoelectric drive has the advantages of high precision,high vibration frequency,high force density,fast response,no electromagnetic interference,power off self-locking and excellent environmental adaptability,and is widely used in the field of ultra-precision machining,and has become a core key technology in ultra-precision machining technology.Actuating principle,classification and characteristics of piezoelectric drive technology are described systematically,the actuation principle and development status of piezoelectric drive are analyzed,and then the application status of piezoelectric drive technology in ultra-precision machining is introduced from three aspects:processing,positioning,and vibration suppression.Finally,the development direction of piezoelectric drive technology is discussed and prospected.关键词
压电驱动技术/超精密驱动/超精密加工/驱动控制/驱动应用Key words
piezoelectric drive technology/ultra-precision drive/ultra-precision machining/drive control/driver application分类
机械制造引用本文复制引用
肖晓兰,林健鑫,区楚塬,张锦河,郑美思,李享,秦岩丁,田延岭..压电驱动在超精密加工领域的应用现状与发展趋势综述[J].机电工程技术,2024,53(7):34-40,7.基金项目
省部共建精密电子制造技术与装备国家重点实验室开放课题资助(JMDZ2021007,JMDZ2021009) （JMDZ2021007,JMDZ2021009）
