控制理论与应用2024，Vol.41Issue(7)：1255-1263,9.DOI:10.7641/CTA.2024.30610
面向高密度柔性集成电路封装基板的精密视觉检测算法
Precision visual inspection algorithms for high-density flexible integrated circuit packaging substrates
摘要
Abstract
Flexible integrated circuit(IC)packaging substrates with a high density are essential for holding electronic components.Strict quality control is required during their manufacturing operations,which include developing and etching.For the purpose of acquiring images and ensuring the quality control of flexible IC packaging substrates,an industrial camera and metallographic microscope are integrated into an imaging vision inspection system.To address the challenges of narrow field of vision and defocus vulnerability in microscopic imaging,a fast autofocus algorithm for local textures in ternary mode based on median value is proposed.Furthermore,to tackle the uneven distribution of oxidation defects on flexible IC packaging under high magnification,a high-precision surface oxidation distribution feature detection model based on dynamic curve evolution is developed,incorporating differential geometry and utilizing geometric features like curvature.Experimental research,both qualitative and quantitative,confirms the superior performance of both algorithms in terms of speed and accuracy.关键词
柔性IC封装基板/品质控制/外观视觉检测/自动对焦检测算法/微分几何Key words
flexible IC packaging substrate/quality control/visual inspection of appearance/autofocus detection algo-rithm/differential geometric引用本文复制引用
胡跃明,黄丹,于永兴,罗家祥..面向高密度柔性集成电路封装基板的精密视觉检测算法[J].控制理论与应用,2024,41(7):1255-1263,9.基金项目
广州市基础与应用基础研究项目(2023A04J1691),广西汽车零部件与整车技术重点实验室项目(2022GKLACVTKF04),国家自然基金面上项目(62271214),中央高校基本科研业务费专项资金项目(2023ZYGXZR009),广州市科技计划项目(2023B01J0037)资助.Supported by the Guangzhou Basic and Applied Basic Research Project(2023A04J1691),the Key Laboratory for Automotive Parts and Complete Vehicle Technology of Guangxi Province(2022GKLACVTKF04),the General Program of National Natural Science Foundation of China(62271214),the Fundamental Research Funds for the Central Universities(2023ZYGXZR009)and the Guangzhou Science and Technology Plan Project(2023B01J0037). （2023A04J1691）
