理化检验-物理分册2024，Vol.60Issue(7)：31-34,4.DOI:10.11973/lhjy-wl240042
使用飞行时间二次离子质谱法判定痕量氧元素的测试方法
A testing method for determining trace oxygen elements using time of flight secondary ion mass spectrometry
冯殿福 1崔云 2陶春先 1杨峰 3侯瑶1
作者信息
- 1. 上海理工大学 光电信息与计算机工程学院,上海 200093
- 2. 中国科学院上海光学精密机械研究所薄膜光学实验室,上海 201800
- 3. 中国科学院 理化技术研究所功能晶体与激光技术重点实验室,北京 100190
- 折叠
摘要
Abstract
Trace oxygen elements in CaF2 crystal,YF3 thin films and Au thin films were tested using time of flight secondary ion mass spectrometry.The results show that by changing the size of the analytical ion source aperture to change the ion beam current,the unit area ion dose acting on the sample surface was changed.As the ion beam current increased,the fluoride and oxygen ion yields of CaF2 crystal and YF3 film both increased,indicating the presence of oxygen in CaF2 crystal and YF3 film.The test results were consistent with the UV spectrum test results of CaF2 and the infrared spectrum test results of YF3 film.When the ion beam current increased,the Au ion yield increased,while the oxygen ion yield showed no significant change,indicating that the detected oxygen element came from residual gas in the experimental environment,and there was no oxygen element present in the Au film.关键词
飞行时间二次离子质谱/痕量元素/残余气体/离子束流Key words
time of flight secondary ion mass spectrometry/trace element/residual gas/ion beam current分类
机械制造引用本文复制引用
冯殿福,崔云,陶春先,杨峰,侯瑶..使用飞行时间二次离子质谱法判定痕量氧元素的测试方法[J].理化检验-物理分册,2024,60(7):31-34,4.
