物理学报2024，Vol.73Issue(15)：23-34,12.DOI:10.7498/aps.73.20240644
基于相位调制的高相干光源照明匀化方法
Illumination homogenization of highly coherent light source based on phase modulation
魏嘉昕 1沙鹏飞 1方旭晨 1卢增雄 1李慧 1谭芳蕊 2吴晓斌1
作者信息
- 1. 中国科学院微电子研究所,光电技术研发中心,北京 100029||中国科学院大学,北京 100049
- 2. 中国科学院微电子研究所,光电技术研发中心,北京 100029
- 折叠
摘要
Abstract
When using a fly's eye lens system to homogenize highly coherent light sources,the interference effect between the sub-beams can cause a periodic speckle distribution of illumination intensity,thereby disrupting illumination uniformity.It has been shown that using a rotating optical phase-shift plate behind the fly's eye lens can eliminate interference patterns,but it only demonstrates engineering realizations.And the theoretical analysis and technical guidance on the phase modulation method and statistical averaging method for fly's eye lens homogenization systems are still lacking.In this work,a simulation model of fly's eye random phase modulation homogenization system is developed and studied in detail.Each sub-beam of the fly's eye lens is randomly phase-modulated to break the coherence condition,and the illumination intensity of multiple independent modulations is accumulated to eliminate the interference pattern.The more times the intensity is accumulated,the better the homogenization is.Meanwhile,studied in this paper are the influence of the diffraction effect on homogenization,and the influence of the sub-lens size and focal length on the homogenization,which result in the diffracting-type system and the imaging-type system respectively.For an imaging type system,it is necessary to ensure that the first fly's eye lens is in the front focal plane of the second fly's eye lens.By optimizing the parameters of the fly's eye lens and using an imaging-type system with p=1.8 mm and fA=9 mm,a Gaussian beam with the non-uniformity of 117%is homogenized into a flat-topped beam with the non-uniformity of 1.2%in a square illumination area of 100 mm2.This fly's eye lens random phase modulation homogenization system has a simple structure,low energy loss,and good illumination uniformity,and can be used in systems that require high coherent laser input and high resolution.This technology can be used in the field of deep-ultraviolet mask defect detection.关键词
高相干光/匀化/蝇眼透镜/相位调制Key words
high-coherence light/homogenization/fly's eye lens/phase modulation引用本文复制引用
魏嘉昕,沙鹏飞,方旭晨,卢增雄,李慧,谭芳蕊,吴晓斌..基于相位调制的高相干光源照明匀化方法[J].物理学报,2024,73(15):23-34,12.
