物理学报2024，Vol.73Issue(15)：168-176,9.DOI:10.7498/aps.73.20240688
偏振调制扫描光学显微镜方法
Polarization modulation scanning optical microscopy method
摘要
Abstract
Since the discovery of monolayer graphene,the novel physical properties of two-dimensional(2D)materials,particularly those with fewer layers that often exhibit unique properties different from bulk materials,have received significant attention.Therefore,accurately determining the layer number or obtaining the microscopic surface morphology is crucial in the laboratory fabrication and during device manufacturing.However,traditional detection methods have numerous drawbacks.There is an urgent need for a convenient,accurate,and non-destructive scientific method to characterize the layer number and surface microstructure of 2D materials.By combining the experimental setup of laser scanning photocurrent spectroscopy,we develop a polarization-modulated scanning optical microscope based on the principle of reflectance difference spectroscopy.By monitoring the reflectivity of the samples,we can observe changes in the reflection signal strength of MoS2 with different layer numbers.The intensity of the reflectance differential spectral signal reflects changes in the layer count within the sample.We can characterize the changes in the number of layers of 2D materials in a non-contact manner by using polarization-modulated scanning optical microscopy.Through the study of the reflectance differential spectra of two typical 2D layered materials,MoS2 and ReSe2,we find that our polarization-modulated scanning optical microscope system is also more sensitive to the characteristics of the stacking anisotropy of the 2D materials than the conventional reflection microscope.This indicates that our research contributes to a better understanding of the layer number characteristics and anisotropic properties of layered 2D materials.Furthermore,our research also provides a non-contact optical method to characterize the number of layers and optical anisotropy of two-dimensional layered material.关键词
反射各向异性光谱/显微成像/光学各向异性/二维材料Key words
reflectance anisotropy spectroscopy/microscopic imaging/optical anisotropy/two-dimensional materials引用本文复制引用
张洋,张志豪,王宇剑,薛晓兰,陈令修,石礼伟..偏振调制扫描光学显微镜方法[J].物理学报,2024,73(15):168-176,9.基金项目
国家自然科学基金专项基金(批准号:62341406)、江苏省基础研究计划(自然科学基金)-青年基金(批准号:BK20221113)和徐州市科技项目-基础研究计划(批准号:KC23004)资助的课题.Project supported by the Special Funds of the National Natural Science Foundation of China(Grant No.62341406),the Young Scientists Fund of the Natural Science Foundation of Jiangsu Province,China(Grant No.BK20221113),and the Science and Technology Project-Basic Research Plan of Xuzhou,China(Grant No.KC23004). （批准号:62341406）
