中国光学（中英文）2024，Vol.17Issue(4)：771-779,9.DOI:10.37188/CO.2023-0224
用于高压测量的MEMS硅-玻光纤FP压力传感器
MEMS silicon-glass fiber-optic FP pressure sensor for high-pressure measurements
摘要
Abstract
We investigate a silicon-glass fiber-optic Fabry-Perot(FP)pressure sensor based on Micro-Elec-tro-Mechanical Systems(MEMS)technology for high-pressure measurements.Silicon material was used as the sensitive element,and the Inductively Coupled Plasma(ICP)dry-etched monocrystalline silicon dia-phragm was anode bonded with a high borosilicate glass to form the FP cavity.The sensor head was manu-factured in batches utilizing MEMS technology,which is structurally stable,strongly resistant to overload,and not prone to fail in high-pressure environments.The experimental results show that the sensor can acheive high-pressure measurements up to 30 MPa with a sensitivity of 46.94 nm/MPa and a linearity of 0.99897,with high consistency and reliable measurement results.The designed pressure sensor has strong application prospects in high-pressure sensing.关键词
MEMS/光纤传感器/压力测量/FP干涉Key words
MEMS/fiber-optic sensor/pressure measurement/FP interferometer分类
信息技术与安全科学引用本文复制引用
付雨薇,王睿楠,唐文婷,杜喜昭,王伟,陈海滨..用于高压测量的MEMS硅-玻光纤FP压力传感器[J].中国光学（中英文）,2024,17(4):771-779,9.基金项目
陕西省重点研发计划(No.2023-GHZD-52) （No.2023-GHZD-52）
陕西省教育厅重点研究计划(No.22JY026)Supported by Key Research and Development Project of Shaanxi Province(No.2023-GHZD-52) （No.22JY026）
Key Re-search Programs of Shaanxi Provincial Education Department(No.22JY026) （No.22JY026）
