中国光学（中英文）2024，Vol.17Issue(4)：852-861,10.DOI:10.37188/CO.2023-0180
面向微光学元件表面形貌测量的涡旋相移数字全息技术
Vortex phase-shifting digital holography for micro-optical element surface topography measurment
摘要
Abstract
Non-destructive,non-contact phase-shifting digital holography technology has distinct advantages in identifying micro-optical components.As traditional phase-shifting digital holography technology re-quires fine control and cumbersome calibration of the phase shifter,furthermore,its optical path is suscept-ible to mechanical vibration interference,which reduces the quality of the holographically reproduced image.To solve the above problems,we propose a vortex phase-shifting digital holography for the micro-optical ele-ment surface measurement with the help of the special phase distribution of vortex light.The method utilizes a helical phase plate to modulate the vortex phase and introduce a high-precision phase shift.Based on the constructed vortex phase-shifting digital holographic microscopy experimental setup,the actual phase shifts between phase-shift interferograms were determined using the interferometric polarity method,the relation-ship between the rotation angle of the helical phase plate and the phase shift was calibrated,and the feasibil-ity of the vortex phase shift was experimentally verified.Repeated measurement experiments were carried out on the micro-lens arrays,and the measurement results were compared with those of the ZYGO white light interferometer.The results indicate that a single micro-lens's average longitudinal vector height is 12.897 μm with an average relative error of 0.155% .The proposed method enables highly precise measurement of the surface topography of micro-optical elements.It offers the advantages of easy operation,high stability,and high accuracy.关键词
涡旋相移/数字全息显微/螺旋相位板/相位重建Key words
vortex phase shift/digital holographic microscopy/spiral phase plate/phase reconstruction分类
数理科学引用本文复制引用
薛一梦,刘丙才,潘永强,房鑫萌,田爱玲,张瑞轩..面向微光学元件表面形貌测量的涡旋相移数字全息技术[J].中国光学（中英文）,2024,17(4):852-861,10.基金项目
陕西省科技厅项目(No.2023KXJ-066) （No.2023KXJ-066）
陕西省教育厅项目(No.23JY034) （No.23JY034）
陕西省自然科学基础研究计划项目(NO.2024JC-YBMS-523)Supported by Shaanxi Provincial Science and Technology Department Project(No.2023KXJ-066) （NO.2024JC-YBMS-523）
Shaanxi Province Education Department Project(No.23JY034) （No.23JY034）
Shaanxi Provincial Natural Science Basic Research Program Project(NO.2024JC-YBMS-523) （NO.2024JC-YBMS-523）
