面向微光学元件表面形貌测量的涡旋相移数字全息技术OA北大核心CSTPCD

Non-destructive,non-contact phase-shifting digital holography technology has distinct advantages in identifying micro-optical components.As traditional phase-shifting digital holography technology re-quires fine control and cumbersome calibration of the phase shifter,furthermore,its optical path is suscept-ible to mechanical vibration interference,which reduces the quality of the holographically reproduced image.To solve the above problems,we propose a vortex phase-shifting digital holography for the micro-optical ele-ment surface measurement with the help of the special phase distribution of vortex light.The method utilizes a helical phase plate to modulate the vortex phase and introduce a high-precision phase shift.Based on the constructed vortex phase-shifting digital holographic microscopy experimental setup,the actual phase shifts between phase-shift interferograms were determined using the interferometric polarity method,the relation-ship between the rotation angle of the helical phase plate and the phase shift was calibrated,and the feasibil-ity of the vortex phase shift was experimentally verified.Repeated measurement experiments were carried out on the micro-lens arrays,and the measurement results were compared with those of the ZYGO white light interferometer.The results indicate that a single micro-lens's average longitudinal vector height is 12.897 μm with an average relative error of 0.155% .The proposed method enables highly precise measurement of the surface topography of micro-optical elements.It offers the advantages of easy operation,high stability,and high accuracy.