光子传感器(英文版)2024,Vol.14Issue(3):64-74,11.DOI:10.1007/s13320-024-0713-5
Off-Axis Co-Optical Path Large-Range Line Scanning Chromatic Confocal Sensor
Off-Axis Co-Optical Path Large-Range Line Scanning Chromatic Confocal Sensor
摘要
关键词
Chromatic confocal sensor/optical design/off-axis co-optical path/line scanningKey words
Chromatic confocal sensor/optical design/off-axis co-optical path/line scanning引用本文复制引用
Meizhong LIAO,Yuqi YANG,Xiaolian LU,Haiqi LI,Jun ZHANG,Jinfeng WANG,Zhe CHEN..Off-Axis Co-Optical Path Large-Range Line Scanning Chromatic Confocal Sensor[J].光子传感器(英文版),2024,14(3):64-74,11.基金项目
This work was supported by the Basic and Applied Basic Research Foundation of Guangdong Province(Grant No.2021A1515011933) (Grant No.2021A1515011933)
Special Project for Research and Development in Key Areas of Guangdong Province(Grant No.2020B090921002) (Grant No.2020B090921002)
Science and Technology Innovation Strategy Special Project City and County Science and Technology Innovation Support of Guangdong Province(Grant No.2023G006). (Grant No.2023G006)