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离子发动机栅极材料差分溅射产额分布特性仿真

朱政羲 苗龙 耿海 郭德洲 杨统勋 何梓豪 王宁飞

航天器环境工程2024,Vol.41Issue(4):450-458,9.
航天器环境工程2024,Vol.41Issue(4):450-458,9.DOI:10.12126/see.2023160

离子发动机栅极材料差分溅射产额分布特性仿真

Simulation on the distribution characteristics of differential sputtering yields on ion engine grid materials

朱政羲 1苗龙 2耿海 3郭德洲 3杨统勋 1何梓豪 1王宁飞1

作者信息

  • 1. 北京理工大学 宇航学院,北京 100081
  • 2. 北京理工大学 宇航学院,北京 100081||北京理工大学 重庆创新中心,重庆 404100
  • 3. 兰州空间技术物理研究所 真空技术与物理重点实验室,兰州 730000
  • 折叠

摘要

Abstract

In view of the unclear spatial distributions of sputtered atoms from ion engine grid,which leads to significant deviations in grid erosion modeling predictions,the SDTrimSP program was used to simulate the sputtering process of ions bombarding the grid materials.The study systematically investigated the impact of ion incident energy,incident angle,and ion species on the differential sputtering yields of molybdenum grid materials.Under normal incidence,the simulated differential sputtering yields were found to be in good agreement with experimental data.Special attention was given to the distribution profiles of differential sputtering yields at different azimuthal angles under oblique incidence.The Modified-Zhang formula was used to fit the differential sputtering yields.The fitting results were applied as material boundary conditions in the erosion-redeposition model,offering a more realistic simulation of the grid materials'erosion process.This approach may provide a reference for the accurate prediction of the erosion morphology of ion engine grid components.

关键词

离子发动机/钼栅极材料/差分溅射产额/斜入射/腐蚀—再沉积模型

Key words

ion engine/molybdenum grid materials/differential sputtering yield/oblique incidence/erosion-redeposition model

分类

航空航天

引用本文复制引用

朱政羲,苗龙,耿海,郭德洲,杨统勋,何梓豪,王宁飞..离子发动机栅极材料差分溅射产额分布特性仿真[J].航天器环境工程,2024,41(4):450-458,9.

基金项目

国家重点研发计划项目(编号:2022YFB3403500) (编号:2022YFB3403500)

国家自然科学基金项目(编号:52202460) (编号:52202460)

航天器环境工程

OACSTPCD

1673-1379

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