红外技术2024，Vol.46Issue(8)：858-863,6.
低功耗检测CO2的MEMS红外光源结构设计与仿真
Structural Design and Simulation of MEMS Infrared Light Source for CO2 Detection with Low Power Consumption
滕雪松 1禹胜林 1魏志杰 1房村 1熊思娴 1王梦婷1
作者信息
- 1. 南京信息工程大学 电子与信息工程学院,江苏 南京 210000
- 折叠
摘要
Abstract
Conventional carbon dioxide sensors pose significant drawbacks such as large size and high power consumption.In recent years,with the development of semiconductor technology and materials,microelectromechanical systems(MEMS)technology has gradually become the focus of sensor research.In this study,a microelectromechanical system with an infrared light source chip structure for carbon dioxide sensors was designed and investigated.Silicon(Si)was used as the substrate,silicon dioxide(SiO2)-silicon nitride(Si3N4)-silicon dioxide(SiO2)was used as the support layer of the infrared light source,platinum(Pt),which has good ductility,was used as the heating resistor for the radiation area,and aluminum(Al)was used as the electrode.The support layer of the light source adopted a four-axis large rounded corner suspension structure,which significantly reduced the thermal conduction of heat from the radiation area to the substrate and provided better stability.Through finite element simulation analysis,the light source was characterized by low power consumption and a solid structure.关键词
微机械电子系统/红外光源/低功耗/稳固结构Key words
micromechatronic systems/infrared light sources/low power consumption/robust structures分类
电子信息工程引用本文复制引用
滕雪松,禹胜林,魏志杰,房村,熊思娴,王梦婷..低功耗检测CO2的MEMS红外光源结构设计与仿真[J].红外技术,2024,46(8):858-863,6.
