轻工机械2024，Vol.42Issue(4)：25-35,11.DOI:10.3969/j.issn.1005-2895.2024.04.004
基于MD模拟的低能FIB辐照金刚石靶材亚表层损伤形成机理研究
Study on Formation Mechanism of Subsurface Damage of Diamond Irradiated by Low Energy FIB Based on MD Simulation
摘要
Abstract
The application of focused ion beam(FIB)technology,as a special machining method used for diamond micro milling cutters,extent of FIB-induced damage critically influences the tool's performance and longevity.The research group used LAMMPS software for molecular dynamics(MD)simulation,combined with the Stopping and Range of Ions in Matter(SRIM)software analysis results,explored the formation mechanism of subsurface damage in single crystal diamond and the influence of incident ion energy on the depth and range of damage.The simulation results shown that as the incident ion energy increases,the penetration depth of the ion beam into the material and the damage to the amorphous layer and point defects caused by it all increase.Further research has found that the increase in local material temperature during the formation of damage may induce self-annealing process,which was directly proportional to the ion incident energy,this phenomenon was of crucial significance for understanding the damage caused by focused ion beam processing.The significant correspondence between changes in potential energy and damage formation revealed that the potential energy of the first neighboring atom was significantly higher than that of the second neighboring atom,and thus higher than that of other type atoms.This discovery helps to deepen the understanding of the microscopic process of damage formation.Therefore,the meticulous adjustment of incident ion energy emerges as a pivotal factor for achieving high-precision FIB machining of diamond materials,and comprehension of both the self-annealing mechanism and potential energy variations is imperative for effective damage monitoring and management.关键词
金刚石微铣刀/聚焦离子束/分子动力学/亚表层损伤/SRIM软件Key words
diamond micro-milling cutter/FIB(focused ion beam)/MD(Molecular Dynamics)/subsurface damage/SRIM分类
机械制造引用本文复制引用
李啸,王全龙,杨宇,邱蓬勃,武美萍..基于MD模拟的低能FIB辐照金刚石靶材亚表层损伤形成机理研究[J].轻工机械,2024,42(4):25-35,11.基金项目
国家自然科学基金资助项目(51705202) （51705202）
江苏省自然科学基金资助项目(BK20170191) （BK20170191）
江苏省博士后科研资助计划(2021Z325). （2021Z325）
