强激光与粒子束2024，Vol.36Issue(9)：1-9,9.DOI:10.11884/HPLPB202436.240068
光学元件双面抛光加工面型预测模型
Predictive modeling of the surface pattern of double-sided polishing process of optical components
米智恺 1聂凤明 1黄思玲 1薛枫2
作者信息
- 1. 中国兵器科学研究院宁波分院,浙江宁波 315103
- 2. 南京理工大学机械工程学院,南京 210094
- 折叠
摘要
Abstract
To address the challenge of establishing a stable removal function for double-sided polishing to predict the finished surface profile,we use the coordinate transformation method to derive the relative velocity distribution equations for the upper and lower surfaces of the component.Subsequently,static pressure distributions on both surfaces are simulated using ANSYS software.The simulation data is then imported into Matlab and fitted with a polynomial method to determine the time-varying pressure distribution formulas for the component's surfaces.Based on the Preston equation,an expression for the correction coefficient K is derived.The value of the correction coefficient K is calculated to be 2.588×10-15 from four sets of polishing experimental data,enabling the construction of a predictive model for the surface pattern in double-sided polishing processes.The predictive model is ultimately validated through machining experiments.The experimental results indicate that the error in predicting the PV(Peak-to-Valley)value accounts for 1.07%to 7.4%of the actual PV value after processing,demonstrating good agreement between the predicted model and the actual post-processing surface pattern.关键词
双面抛光/面型/预测模型/实验验证Key words
double-sided polishing/surface pattern/predictive modeling/experimental validation分类
机械制造引用本文复制引用
米智恺,聂凤明,黄思玲,薛枫..光学元件双面抛光加工面型预测模型[J].强激光与粒子束,2024,36(9):1-9,9.
