南京理工大学学报（自然科学版）2024，Vol.48Issue(4)：415-421,468,8.DOI:10.14177/j.cnki.32-1397n.2024.48.04.002
非最小相位法向电磁应力驱动快速刀具伺服系统轨迹跟踪控制
Trajectory tracking control for non-minimum phase normal-stressed electromagnetic actuator-based fast tool servo system
摘要
Abstract
Fast tool servo(FTS)diamond turning is effective for the ultra-precision manufacturing of complex-shaped optical surfaces.To further improve the control performance of a non-minimum phase normal-stressed electromagnetic FTS,a system dynamics inversion-based compensator is embedded in the main control-loop to improve the dynamics of the FTS.As for the improved system,a typical proportional-integral-derivative(PID)controller combining the feedforward compensator is introduced as the main controller.Furthermore,taking advantage of the internal model principle,a set of parallel resonant controllers are especially employed to ultra-precise track harmonic trajectories.Considering the non-minimum phase feature,a combination of the factorization and mirror pole placement method is conducted to obtain the stable inverse dynamics model of the system.The experimental results show that the inclusion of the dynamics inversion-based compensator can achieve a closed-loop bandwidth around 1 070 Hz(-3 dB).The tracking error for a 100 Hz sinusoid trajectory is less than±0.375%,and a stable closed-loop tracking of a 5 nm stair trajectory demonstrates the capability of the FTS control system for nano-cutting.关键词
快速刀具伺服/法向电磁应力驱动/非最小相位系统/逆动力学补偿/谐振控制Key words
fast tool servo/normal-stressed electromagnetic actuation/non-minimum phase system/dynamics inversion-based compensator/resonant controller分类
信息技术与安全科学引用本文复制引用
沈东冉,朱紫辉,黄鹏,朱利民,朱志伟..非最小相位法向电磁应力驱动快速刀具伺服系统轨迹跟踪控制[J].南京理工大学学报（自然科学版）,2024,48(4):415-421,468,8.基金项目
国家自然科学基金(U2013211) （U2013211）
工信部制造业高质量发展专项(TC200H02J) （TC200H02J）
中央高校基本科研业务费专项资金(30921013102) （30921013102）
