无机材料学报2024，Vol.39Issue(8)：879-886,中插1-中插2,10.DOI:10.15541/jim20240005
Ti-DLC薄膜压阻性能及载流子输运行为研究
Ti Doped Diamond Like Carbon Films:Piezoresistive Properties and Carrier Transport Behavior
摘要
Abstract
Diamond like carbon(DLC)film was a promising candidate for microelectromechanical system(MEMS)piezoresistive sensors owing to its excellent mechanical properties and sensitivity.The effects of carrier transport behavior and the role of operating conditions(such as temperature,humidity,etc.)on piezoresistive performance of metal-doped DLC were still unclear.In this work,Ti doped diamond like carbon(Ti-DLC)films with Ti atom fraction ranging from 0.43%to 4.11%were prepared using high-power pulse magnetron sputtering,where the high-throughput conception was introduced for film deposition.Effects of the doped Ti content on microstructure,electrical behavior and piezoresistive properties of the films were studied under various humidity environments.The results indicated that the doped Ti atoms were uniformly dissolved in the diamond like carbon matrix,accompanying typical amorphous characteristics for the Ti-DLC films regardless of Ti atom fraction changing from 0.43%to 4.11%.Furthermore,all the Ti-DLC films demonstrated distinct semiconductor feature,where the electrical resistivity was reduced with the increase of temperature in the range of 200-350 K.Particularly,the carrier transport was dominated by Mott type conduction with three-dimensional range hopping conduction from 200 to 270 K,while the thermal activation transport served as the conductive mechanism in the temperature range of 270-350 K.For the Ti-DLC films,the highest gauge factor(GF)was 95.1,and GF value increased with increasing relative humidity from 20%to 80%.This can be explained from reduction of the average distance between conductive cluster by introducing Ti atoms and a change in electrical resistance caused by adsorption of water molecules.关键词
Ti掺杂/类金刚石薄膜/电学性能/可变湿度/压阻行为Key words
Ti doping/diamond like carbon(DLC)film/electrical property/variable humidity/piezoresistive behavior分类
化学化工引用本文复制引用
赵志翰,郭鹏,魏菁,崔丽,刘山泽,张文龙,陈仁德,汪爱英..Ti-DLC薄膜压阻性能及载流子输运行为研究[J].无机材料学报,2024,39(8):879-886,中插1-中插2,10.基金项目
宁波市科技创新 2025 重大专项(2020Z023) （2020Z023）
国家自然科学基金(U20A20296,52205237) （U20A20296,52205237）
宁波市高新区重大技术创新项目(2021CCX050003) Science and Technology 2025 Innovation Project of Ningbo(2020Z023) （2021CCX050003）
National Natural Science Foundation of China(U20A20296,52205237) （U20A20296,52205237）
Ningbo Hi-Tech Industrial Development Zone Technological Innovation Project(2021CCX050003) （2021CCX050003）
