N2流量对CrAlYN涂层结构、力学及热稳定性的影响研究OA北大核心CSTPCD

The flow rate of N2 had a significant impact on the structure and performance of CrAlYN coatings,so this study systematically investigated the influence of N2 flow rate on the structure,mechanical properties,and thermal stability of CrAlYN coatings.The results show that as the N2 flow rate increases from 23 mL/min to 38 mL/min,the nitrogen content in the coating increases from 26.45 at.％to 52.20 at.％.When the N2 flow rate is 33 mL/min,the nitrogen content in the coating is 49.00 at.％,and the elemental composition conforms to the stoichiometric ratio.The coating has the highest hardness and resistance to plastic deformation.XRD and TEM analyses show that coatings with low N2 flow rate has a nanocrystalline structure and lower hardness.The coatings with high N2 flow rate has a columnar crystal structure,and the injection of nitrogen atoms increases the compressive stress of the coating and reduces its hardness.The coating with a N2 flow rate of 33 mL/min has smaller grains and a dense structure,with a hardness of 24.6 GPa.After annealing at 1 000 ℃,the coating shows slight oxidation and a hardness of 18.4 GPa,which is higher than that of coatings with other N2 flow rates,indicating that this CrAlYN coating has the best overall performance.