碳化硅陶瓷脉冲激光加工改性表面特征研究OA北大核心CSTPCD

The silicon carbide ceramics were processed by pulsed laser.The influence of laser process parameters such as laser power,scanning times and spot overlap rate on the modified surface characteristics of the workpiece was investigated by single factor experiment.The experimental results show that when the laser power is small,the workpiece surface forms periodic undulation groove and broken pits are randomly distributed.When the laser power gradually increases,the workpiece surface gradually appears thermal cracks.The surface roughness first decreases and then increases with the increase of laser power.When the scanning times are low,the structure formed on the workpiece surface is shallow and loose.With the increase of laser scanning times,the structure formed on the workpiece surface is uneven.The surface roughness first decreases and then increases with the increase of scanning times.At low spot overlap rate,the workpiece surface groove is shallow and the overall surface undulation is weak.When the spot overlap rate increases,the surface grooves become deeper and the holes appear.The surface roughness increases with the increase of spot overlap rate.