测试科学与仪器2024，Vol.15Issue(3)：292-301,10.DOI:10.62756/jmsi.1674-8042.2024030
非对称法布里-珀罗腔槽型微环谐振器及其传感特性
Asymmetrical Fabry-Perot cavity slot micro-ring resonator and its sensing characteristics
摘要
Abstract
To achieve high quality factor and high-sensitivity refractive index sensor,a slot micro-ring resonator(MRR) based on asymmetric Fabry-Perot (FP) cavity was proposed.The structure consisted of a pair of elliptical holes to form an FP cavity and a micro-ring resonator.The two different optical modes generated by the micro-ring resonator were destructively interfered to form a Fano line shape,which improved the system sensitivity while obtaining a higher quality factor and extinction ratio.The transmission principle of the structure was analyzed by the transfer matrix method.The transmission spectrum and mode field distribution of the proposed structure were simulated by the finite difference time domain(FDTD) method,and the key structural parameters affecting the Fano line shape in the device were optimized.The simulation results show that the quality factor of the device reached 22037.1,and the extinction ratio was 23.9 dB.By analyzing the refractive index sensing characteristics,the sensitivity of the structure was 354 nm·RIU-1,and the detection limit of the sensitivity was 2×10-4 RIU.Thus,the proposed compact asymmetric FP cavity slot micro-ring resonator has obvious advantages in sensing applications owing to its excellent performance.关键词
微环谐振器/法布里-珀罗腔/Fano共振/折射率传感/集成光学/硅基波导Key words
micro-ring resonator(MRR)/Fabry-Perot(FP) cavity/Fano resonance/refractive index sensing/integrated optics/silicon waveguide引用本文复制引用
曹倩倩,刘春娟,吴小所,孙晓丽..非对称法布里-珀罗腔槽型微环谐振器及其传感特性[J].测试科学与仪器,2024,15(3):292-301,10.基金项目
This work was supported by Natural Science Foundation of Gansu Province(No.22JR5RA320). （No.22JR5RA320）
