红外与毫米波学报2024，Vol.43Issue(4)：437-441,5.DOI:10.11972/j.issn.1001-9014.2024.04.001
1 280×1 024元InAs/GaSb Ⅱ类超晶格中/中波双色红外焦平面探测器
1 280×1 024 dual-color mid-wavelength infrared InAs/GaSb superlattice focal plane arrays
摘要
Abstract
In this paper,we report research results of 1 280×1 024 dual-color mid-wavelength infrared InAs/GaSb super-lattice focal plane arrays.The detector structure is PN-NP epitaxial multilayer and the signal is read out by sequential mode.The superlattice structure was grown on GaSb substrate using molecular beam epitaxy(MBE)technology.The respective structures of each absorption region are Mid-Wavelength 1(MW1):6 ML(InAs)/7 ML(GaSb)and Mid-Wavelength 2(MW2):9 ML(InAs)/7 ML(GaSb).The pixel center distance of the detector is 12 μm.At 80 K mea-surements,the detector has spectral response wavelength of 3-4 μm and 3.8-5.2 μm respectively.The MW1 detector has a peak detectivity of 6.32×1011 cm·Hz1/2W-1.The MW2 detector has a peak detectivity of 2.84×1011 cm·Hz1/2W-1.In-frared images of both wavebands have been taken using infrared imaging test by adjusting the device voltage bias.It's the first time that a 1 280×1 024 InAs/GaSb Type Ⅱ superlattice mid-wave length two-color infrared focal plane detec-tor has been reported in China.关键词
焦平面/InAs/GaSb/超晶格/双色Key words
focal plane array/InAs/GaSb/superlattice/dual-color分类
信息技术与安全科学引用本文复制引用
白治中,黄敏,徐志成,周易,梁钊铭,姚华城,陈洪雷,丁瑞军,陈建新..1 280×1 024元InAs/GaSb Ⅱ类超晶格中/中波双色红外焦平面探测器[J].红外与毫米波学报,2024,43(4):437-441,5.基金项目
国家自然科学基金资助项目(62004205,62104236,62104237,62222412)、国家重点研发计划项目(2022YFB3606800)、上海市启明星培育项目扬帆专项(21YF1455000,22YF1455800)、中国科学院上海技术物理研究所创新专项基金资助项目(CX-455) Supported by the National Natural Science Foundation of China(NSFC)(62004205,62104236,62104237,62222412),National Key Research and Development Program of China(2022YFB3606800),Shanghai Rising-Star Program(21YF1455000,22YF1455800)and Special Fund for Innovation of SITP,CAS(CX-455) （62004205,62104236,62104237,62222412）
