红外与毫米波学报2024，Vol.43Issue(4)：457-463,7.DOI:10.11972/j.issn.1001-9014.2024.04.004
基于InAs/GaAsSb超晶格的中红外波导探测器结构设计
Structural design of mid-infrared waveguide detectors based on InAs/GaAsSb superlattice
摘要
Abstract
In the realm of near-infrared spectroscopy,the detection of molecules has been achieved using on-chip waveguides and resonators.In the mid-infrared band,the integration and sensitivity of chemical sensing chips are often constrained by the reliance on off-chip light sources and detectors.In this study,we demonstrate an InAs/GaAsSb superlattice mid-infrared waveguide integrated detector.The GaAsSb waveguide layer and the InAs/GaAsSb superlattice absorbing layer are connected through evanescent coupling,facilitating efficient and high-quality detection of mid-infrared light with minimal loss.We conducted a simulation to analyze the photoelectric characteristics of the device.Additionally,we investigated the factors that affect the integration of the InAs/GaAs-Sb superlattice photodetector and the GaAsSb waveguide.Optimal thicknesses and lengths for the absorption lay-er are determined.When the absorption layer has a thickness of 0.3 μm and a length of 50 μm,the noise equiva-lent power reaches its minimum value,and the quantum efficiency can achieve a value of 68.9%.The utilization of waveguide detectors constructed with Ⅲ-Ⅴ materials offers a more convenient means of integrating mid-infra-red light sources and achieving photoelectric detection chips.关键词
InAs/GaAsSb 超晶格/波导探测器/倏逝波耦合/GaAsSb 波导Key words
InAs/GaAsSb superlattice/waveguide detector/evanescent coupling/GaAsSb waveguide分类
信息技术与安全科学引用本文复制引用
裴金狄,柴旭良,王昱彭,周易..基于InAs/GaAsSb超晶格的中红外波导探测器结构设计[J].红外与毫米波学报,2024,43(4):457-463,7.基金项目
Supported by the National Natural Science Foundation of China(NSFC)(61904183,61974152,62104237,62004205) （NSFC）
the Youth In-novation Promotion Association of the Chinese Academy of Sciences(Y202057) （Y202057）
Shanghai Science and Technology Committee Rising-Star Program(20QA1410500) （20QA1410500）
Shanghai Sail Plans(21YF1455000). （21YF1455000）
