红外与毫米波学报2024，Vol.43Issue(4)：479-489,11.DOI:10.11972/j.issn.1001-9014.2024.04.007
单片集成式中波碲镉汞偏振焦平面阵列
A monolithic integrated medium wave Mercury Cadmium Telluride polarimetric focal plane array
摘要
Abstract
A medium wave(MW)640×512(25 μm)Mercury Cadmium Telluride(HgCdTe)polarimetric focal plane array(FPA)was demonstrated.The micro-polarizer array(MPA)has been carefully designed in terms of line grating structure optimization and crosstalk suppression.A monolithic fabrication process with low damage was explored,which was verified to be compatible well with HgCdTe devices.After monolithic integration of MPA,NETD＜9.5 mK was still maintained.Furthermore,to figure out the underlying mechanism that dominat-ed the extinction ratio(ER),specialized MPA layouts were designed,and the crosstalk was experimentally vali-dated as the major source that impacted ER.By expanding opaque regions at pixel edges to 4 μm,crosstalk rates from adjacent pixels could be effectively reduced to approximately 2%,and promising ERs ranging from 17.32 to 27.41 were implemented.关键词
红外物理/红外偏振焦平面阵列/单片集成/碲镉汞/消光比Key words
infrared physics/infrared polarimetric focal plane array/monolithic integration/Mercury Cadmium Telluride/extinction ratio分类
数理科学引用本文复制引用
陈泽基,黄佑文,浦恩祥,肖徽山,徐世春,秦强,孔金丞..单片集成式中波碲镉汞偏振焦平面阵列[J].红外与毫米波学报,2024,43(4):479-489,11.基金项目
Supported by the self-funded project of Kunming Institute of Physics （）
