8.5 μm高性能长波红外量子级联激光器的光学腔面镀膜研究OA北大核心CSTPCD
Optical facet coatings for high-performance LWIR quantum cascade lasers at λ ∼ 8.5 μm
通过研究和优化长波红外量子级联激光器(LWIR QCLs)的光学腔面增透(AR)膜,可提高器件的输出性能.与Al2O3膜系相比,Y2O3 AR膜表现出更高的腔面光学灾变(COMD)水平,两种膜系的光学腔面镀膜均无光束转向效应.对激射波长为8.5 μm的3 mm腔长、9.5 μm脊宽掩埋异质结(BH)LWIR QCL使用Y2O3膜系的金属高反(HR)膜和反射率约0.2%的AR膜,在298 K下获得了2.19 W的最高脉冲峰值功率,较未镀膜器件提高149%.对于连续波(CW)操作,通过优化Y2O3 AR膜的反射率,最高输出功率达到0.73 W,较未镀膜器件提高91%.
We report on the performance improvement of long-wave infrared quantum cascade lasers(LWIR QCLs)by studying and optimizing the anti-reflection(AR)optical facet coating.Compared to the Al2O3 AR coat-ing,the Y2O3 AR coating exhibits higher catastrophic optical mirror damage(COMD)level,and the optical facet coatings of both material systems have no beam steering effect.A 3-mm-long,9.5-μm-wide buried-heterostruc-ture(BH)LWIR QCL of λ～8.5 μm with Y2O3 metallic high-reflection(HR)and AR of～0.2%reflectivity coating demonstrates a maximum pulsed peak power of 2.19 W at 298 K,which is 149%higher than that of the uncoated device.For continuous-wave(CW)operation,by optimizing the reflectivity of the Y2O3 AR coating,the maximum output power reaches 0.73 W,which is 91%higher than that of the uncoated device.
马源;林羽喆;万晨杨;王紫纤;周旭彦;张锦川;刘峰奇;郑婉华
中国科学院半导体研究所 固态光电信息技术重点实验室,北京 100083||中国科学院大学 材料科学与光电工程中心,北京 100049中国科学院半导体研究所 固态光电信息技术重点实验室,北京 100083中国科学院半导体研究所 固态光电信息技术重点实验室,北京 100083||潍坊先进光电芯片研究院,山东 潍坊 261021
物理学
量子级联激光器长波红外光学腔面镀膜腔面光学灾变
quantum cascade laserslong-wave infraredoptical facet coatingscatastrophic optical mirror damage
《红外与毫米波学报》 2024 (004)
497-502 / 6
Supported by the National Natural Science Foundation of China(12393830)
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