包装学报2024，Vol.16Issue(5)：18-27,51,11.DOI:10.3969/j.issn.1674-7100.2024.05.003
氮气流量对氮化钛涂层微观结构与性能的影响
Influence of Nitrogen Flow Rate on Micro structure and Properties of Titanium Nitride Coatings
摘要
Abstract
Titanium nitride coatings were prepared on Ti6A14V titanium alloy via DC reactive sputtering technology at different nitrogen flow rates.The coating was characterized by scanning electron microscope(SEM),X-ray diffractometer(XRD),X-ray photoelectron spectroscopy(XPS),scratch tester,and electrochemical workstation to investigate the influence of nitrogen flow rate on the coating's microstructure and properties.Results indicate that at 0.3 mL/min nitrogen flow rate,the coating exhibits an amorphous structure,while at 0.5～3.5 mL/min,there is a titanium nitrogen oxide crystal phase.As the nitrogen flow rate increases,the N element content in the coating decreases,the O element content increases,the coating thickness decreases,and the density,interface bonding,and corrosion resistance are enhanced.关键词
Ti6Al4V/直流反应溅射/氮化钛涂层/结合力/耐蚀性Key words
Ti6Al4V/DC reactive sputtering/titanium nitride coating/adhesion/corrosion resistance分类
矿业与冶金引用本文复制引用
李健智,李文元,潘旭,罗侃,丁泽良..氮气流量对氮化钛涂层微观结构与性能的影响[J].包装学报,2024,16(5):18-27,51,11.基金项目
湖南省自然科学基金资助项目(2023JJ50163) （2023JJ50163）
