计量学报2024，Vol.45Issue(9)：1262-1272,11.DOI:10.3969/j.issn.1000-1158.2024.09.03
芯片研制用微纳米尺度温度测量方法及其展望
The Methods and Prospects of Temperature Measurement for Chip Development in Micro-nano Meter Scale
摘要
Abstract
Temperature measurement in micro-nano meter scale provides high-precision temperature information in tiny areas.The current temperature measurement technology is unable to meet the increasing performance demands of chips.Traditional contact temperature measurement methods such as thermocouple have high precision,but slow response rate,it is difficult to achieve wide field thermal imaging.Non-contact methods such as infrared radiation can achieve rapid thermal field measurement,but the accuracy is low and the wavelength is limited.The traditional temperature measurement methods are inadequate for achieving high precision,rapid temperature measurement at micro-nano scales.With the development of quantum precision temperature measurement technology,diamond negatively charged nitrogen-vacancy(NV-)center temperature measurement technology based on solid quantum spin effect is expected to solve the above problems,breaking through the existing micro-nano scale temperature measurement in the development of chip application bottleneck.In view of this,we first review the characteristics and development status of the existing chip temperature measurement technology,and then analyze the characteristics of diamond NV-center temperature measurement,miniaturization and integration technology trends.Finally,the technical advantages and application prospects in the field of chip development are prospected,and the challenges facing its development are put forward.关键词
温度测量/芯片研制/金刚石NV色心/微纳米尺度/小型化Key words
temperature measurement/chip development/NV-centers in diamond/micro-nano meter scale/miniaturization分类
通用工业技术引用本文复制引用
吴飞翔,邢力,冯晓娟,张金涛,孙坚..芯片研制用微纳米尺度温度测量方法及其展望[J].计量学报,2024,45(9):1262-1272,11.基金项目
中国计量科学研究院重点领域基本科研业务费项目(AKYZD2209-1) （AKYZD2209-1）
中国博士后科学基金(2021M703049) （2021M703049）
