计量学报2024，Vol.45Issue(9)：1401-1406,6.DOI:10.3969/j.issn.1000-1158.2024.09.19
在片S参数计量比对结果浅析
Analysis of the Measurement Comparison Results of On-wafer S-parameters
刘晨 1陈科元 2高岭 1栾鹏 1陈婷 3黄英龙 4李艳奎 5金诚 6邹喜跃 7陆景8
作者信息
- 1. 中国电子科技集团公司第十三研究所,河北石家庄 050051
- 2. 河北雄安太芯电子科技有限公司,河北保定 071799
- 3. 北京无线电计量测试研究所,北京 100854
- 4. 中国电子技术标准化研究院,北京 100176
- 5. 中国科学院微电子研究所,北京 100029
- 6. 中国电子科技集团公司第十四研究所,江苏南京 210013
- 7. 湖南时变通讯科技有限公司,湖南湘潭 411104
- 8. 华美博科技(北京)有限公司,北京 100097
- 折叠
摘要
Abstract
As the leading laboratory,the 13th Research Institute of China Electronics Technology Group Corporation carried out the measurement comparison of on-wafer S-parameters,summarized and analyzed the measurement results of on-wafer S-parameters submitted by the joined laboratories,and evaluated the measurement results of each laboratory with En.Through the measurement comparison of the on-wafer S-parameters,the accuracy and reliability of the transmission of the quantities are ensured,especially the main sources of the measurement uncertainty of the on-chip S-parameters are unified.At the same time,it also provides the industry with a comparison platform for the consistency of on-chip S-parameter measurement.关键词
无线电计量/在片S参数/计量比对/矢量网络分析仪Key words
radio metrology/wafer S-parameters/measurement comparison/vector network analyzer分类
通用工业技术引用本文复制引用
刘晨,陈科元,高岭,栾鹏,陈婷,黄英龙,李艳奎,金诚,邹喜跃,陆景..在片S参数计量比对结果浅析[J].计量学报,2024,45(9):1401-1406,6.
