湿法冶金2024，Vol.43Issue(5)：504-512,9.DOI:10.13355/j.cnki.sfyj.2024.05.005
湿法磷酸除砷制备电子级磷酸研究进展
Research Progress on Preparation of Electronic Grade Phosphoric Acid by Removing Arsenic from Wet-process Phosphoric Acid
肖睿 1李韬 2任美洁 3黄一敏 3宁平 3刘繁松3
作者信息
- 1. 昆明理工大学环境科学与工程学院,云南 昆明 650000
- 2. 江西省地质局第七地质大队,江西 赣州 341000
- 3. 昆明理工大学环境科学与工程学院,云南 昆明 650000||冶金及化工行业废气资源化国家地方联合工程研究中心,云南 昆明 650000
- 折叠
摘要
Abstract
The preparation of electronic grade phosphoric acid by deep removing arsenic from wet-process phosphoric acid is an important technical link to develop phosphorus chemical industry with high quality and promote the technological transformation of phosphorus chemical industry.Electronic grade phosphoric acid requires a mass fraction of arsenic less than 1 × 10-7 kg/kg,but because the physicochemical parameters of arsenic and phosphorus are similar,how to achieve the deep separation of arsenic from phosphoric acid has become the key to the preparation of electronic grade phosphoric acid.In this paper,the main international and domestic quality standards for electronic grade phosphoric acid products are systematically reviewed,and the harm of arsenic to electronic grade phosphoric acid etched microelectronic components is summarized.The research progress,advantages and disadvantages of chemical precipitation,crystallization,electrodeposition,electrodialysis and adsorption are summarized,and the development trend of electron grade phosphoric acid prepared by wet phosphoric acid is prospected.关键词
湿法磷酸/砷/深度脱除/电子级磷酸/制备/危害/研究进展Key words
wet-process phosphoric acid/arsenic/deep purification/electronic grade phosphoric acid/preparation/harm/research progress分类
冶金工业引用本文复制引用
肖睿,李韬,任美洁,黄一敏,宁平,刘繁松..湿法磷酸除砷制备电子级磷酸研究进展[J].湿法冶金,2024,43(5):504-512,9.
