中国光学（中英文）2024，Vol.17Issue(5)：1139-1149,11.DOI:10.37188/CO.2023-0056
小闪耀角单晶硅光栅结构参数优化及制备工艺
Optimization of structural parameters and fabrication of monocrystalline silicon gratings with small blazed angle
摘要
Abstract
In order to meet the requirements of the national synchrotron radiation source,the anisotropic wet-etching technology of monocrystalline silicon grating with small blazed angle is studied,and the blazed grat-ing suitable for the medium wave soft X-ray band is prepared.Based on the rigorously coupled wave theory,the structural parameters and process tolerance of the small blazed angle grating are designed.In the crystal alignment process,the crystal orientation of the silicon wafer is determined by ring-preetching,and then the grating mask is aligned with the crystal direction of monocrystalline silicon<111>based on the frequency doubling adjustment method.At the same time,the effect of the photoresist ashing technique and the active agent on the groove quality of the grating is investigated,and the scintillating gratings close to the ideal saw-tooth groove shape are successfully prepared by the monocrystalline silicon anisotropic wet etching process.The experimental results show that the blazed angle of the prepared grating is 1°,the linear density is 1200 gr/mm,and the root mean square roughness of the blazed surface is less than 0.5 nm.This method can be applied to the fabrication of the medium wave soft X-ray blazed grating,which can greatly reduce the dif-ficulty and cost of fabrication while achieving high diffraction efficiency.关键词
闪耀光栅/单晶硅/晶向对准/湿法刻蚀Key words
blazed grating/monocrystalline silicon/crystalline alignment/wet etching分类
信息技术与安全科学引用本文复制引用
徐昊宇,姜岩秀,陈星硕,王瑞鹏,张靖,巴音贺希格..小闪耀角单晶硅光栅结构参数优化及制备工艺[J].中国光学（中英文）,2024,17(5):1139-1149,11.基金项目
国家自然科学基金项目(No.U21A20509) （No.U21A20509）
中国科学院关键核心技术攻关项目(No.20200602051ZP) （No.20200602051ZP）
吉林省自然科学基金项目(No.20210101139JC) （No.20210101139JC）
中国科学院科学仪器设备开发项目(No.YJKYYQ20200003) （No.YJKYYQ20200003）
中国科学院青年创新促进会项目(No.2022218) Supported by the National Natural Science Foundation of China(No.U21A20509) （No.2022218）
Key Core Technology Re-search Project of Chinese Academy of Sciences(No.20200602051ZP) （No.20200602051ZP）
Natural Science Foundation of Jilin Province(No.20210101139JC) （No.20210101139JC）
Scientific Instrument and Equipment Development Project of Chinese Academy of Sciences(No.YJKYYQ20200003) （No.YJKYYQ20200003）
Youth Innovation Promotion Association of the Chinese Academy of Sciences(No.2022218) （No.2022218）
