中南民族大学学报（自然科学版）2024，Vol.43Issue(6)：827-834,8.DOI:10.20056/j.cnki.ZNMDZK.20240613
磁控溅射制备TGZO透明导电薄膜的电学和非线性光学性能研究
Electrical and nonlinear optical properties of TGZO transparent conducting films deposited by magnetron sputtering
摘要
Abstract
Thin transparent oxide conducting films(TCOFs)of titanium and gallium substituted zinc oxide(TGZO)were fabricated via radio frequency(RF)magnetron sputtering technique.The effects of RF power on electrical,linear and nonlinear optical characteristics were investigated by Hall tester,Ultraviolet(UV)-visible spectrophotometer and optical characterization method.The results indicate that RF power significantly influences the electrical and optical properties of the deposited films.As RF power raises,the resistivity and Urbach energy fall initially and then rise,while the figure of merit,mean visible transmittance and optical bandgap show the reverse variation trend.At RF power of 190 W,the TGZO sample exhibits the highest electro-optical properties,with the maximum figure of merit(1.14×104 Ω-1∙cm-1),mean visible transmittance(86.9%)and optical bandgap(3.50 eV),the minimum resistivity(6.26×10-4 Ω∙cm)and Urbach energy(174.23 meV).In addition,the optical constants of the deposited films were determined by the optical spectrum fitting method,and the RF power dependence of nonlinear optical properties was studied.It is observed that all the thin films exhibit normal dispersion characteristics in the visible region,and the nonlinear optical parameters are greatly affected by the RF power in the ultraviolet region.关键词
掺杂氧化锌/薄膜/光电性能/非线性光学性质Key words
doped ZnO/thin films/electro-optical performance/nonlinear optical properties分类
信息技术与安全科学引用本文复制引用
钟志有,冯朝德,顾锦华,龙浩,杨春勇..磁控溅射制备TGZO透明导电薄膜的电学和非线性光学性能研究[J].中南民族大学学报（自然科学版）,2024,43(6):827-834,8.基金项目
国家自然科学基金资助项目(12075322) （12075322）
