首页|期刊导航|Transactions of Nanjing University of Aeronautics and Astronautics|Wafer Defect Map Pattern Recognition Based on Improved ResNet

Wafer Defect Map Pattern Recognition Based on Improved ResNet

YANG Yining WEI Honglei

Transactions of Nanjing University of Aeronautics and Astronautics2024，Vol.41Issue(S01)：P.81-88,8.

Transactions of Nanjing University of Aeronautics and Astronautics2024，Vol.41Issue(S01)：P.81-88,8.DOI:10.16356/j.1005-1120.2024.S.010

Wafer Defect Map Pattern Recognition Based on Improved ResNet

YANG Yining ¹WEI Honglei¹

作者信息

1. College of Mechanical Engineering and Automation,Dalian Polytechnic University,Dalian 116034,P.R.China
折叠

摘要

关键词

ResNet/deep learning/machine vision/wafer defect map pattern recogniton

分类

信息技术与安全科学

引用本文复制引用

YANG Yining,WEI Honglei..Wafer Defect Map Pattern Recognition Based on Improved ResNet[J].Transactions of Nanjing University of Aeronautics and Astronautics,2024,41(S01):P.81-88,8.

基金项目

supported by the 2021 Annual Scientific Research Funding Project of Liaoning Pro-vincial Department of Education(Nos.LJKZ0535,LJKZ0526) （Nos.LJKZ0535,LJKZ0526）

the Natural Science Foundation of Liaoning Province(No.2021-MS-300)。（No.2021-MS-300）

Transactions of Nanjing University of Aeronautics and Astronautics

OACSTPCD

ISSN：1005-1120

访问量0

下载量0

段落导航