Single-fundamental-mode cryogenic(3.6 K)850-nm oxideconfined VCSELOACSTPCDEI
Cryogenic oxide-confined vertical-cavity surface-emitting laser(VCSEL)has promising application in cryogenic optical interconnect for cryogenic computing.In this paper,we demonstrate a cryogenic 850-nm oxide-confined VCSEL at around 4 K.The cryogenic VCSEL with an optical oxide aperture of 6.5μm in diameter can operate in single fundamental mode with a side-mode suppression-ratio of 36 dB at 3.6 K,and the fiber-coupled output power reaches 1 mW at 5 mA.The small signal modulation measurements at 298 and 292 K show the fabricated VCSEL has the potential to achieve a high modulation bandwidth at cryogenic temperature.
Anjin Liu;Chenxi Hao;Jingyu Huo;Hailong Han;Minglu Wang;Bao Tang;Lingyun Li;Lixing You;Wanhua Zheng;
Key Laboratory of Optoelectronic Materials and Devices,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,ChinaShanghai Key Laboratory of Superconductor Integrated Circuit Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,ChinaAccelink technologies co.,Ltd,Wuhan 430205,ChinaCenter of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China Key Laboratory of Solid-State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
电子信息工程
VCSELcryogenic temperaturecryogenic computingoptical interconnect
《Journal of Semiconductors》 2024 (010)
P.69-73 / 5
supported by the National Natural Science Foundation of China(Nos.62275243,62075209,and 61675193);the Beijing Natural Science Foundation(No.Z200006).
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