传感技术学报2024，Vol.37Issue(9)：1473-1477,5.DOI:10.3969/j.issn.1004-1699.2024.09.001
具有紧凑结构的芯片声表面波拓扑延迟线设计与分析
Design and Analysis of Chip Surface Acoustic Wave Topological Delay Lines with a Compact Structure
孙毅鹏 1王济乾 2孟伟 2王越飞 2胡永芳 2严坤 2韩磊3
作者信息
- 1. 南京电子技术研究所,江苏 南京 210039||东南大学MEMS教育部重点实验室,江苏 南京 210096
- 2. 南京电子技术研究所,江苏 南京 210039
- 3. 东南大学MEMS教育部重点实验室,江苏 南京 210096
- 折叠
摘要
Abstract
Surface acoustic wave(SAW)delay lines have been widely utilized in modern RF signal processing,gyrometers,sensing,and particularly in the radar industry.They serve as core devices in radar systems such as spread-spectrum communication systems,electron-ic countermeasure systems,and multiphase modulation systems.Therefore,there is a pressing need for SAW delay lines with simple and compact structures.Nevertheless,in traditional electroacoustic interdigital transducer-based SAW delay lines,increasing the delay time can only be accomplished by either employing substrate materials with lower velocities or using multiple IDTs,which results in lower electromechanical coupling coefficients and a more complex device structure.Herein,an on-chip SAW delay line that exploits the ben-ding immunity characteristic of the topological protected edge state is proposed.Through folding the transmission path and modulating the velocity of the SAW,the delay line is capable of attaining a large delay time within a very compact structure.Under the same device volume and interdigital transducer configuration,the delay time is increased by more than 4 times compared with the traditional delay line,and can be further optimized.This surface acoustic wave topological delay line is compatible with Micro-Electro-Mechanical sys-tems(MEMS)processes,so,it can be easily integrated into MEMS devices and integrated circuits,clearing the path for the application of advanced artificial materials in integrated devices.关键词
多物理场仿真/声表面波/延迟线/声子晶体Key words
multi-physics simulation/surface acoustic wave/delay line/phononic crystal分类
信息技术与安全科学引用本文复制引用
孙毅鹏,王济乾,孟伟,王越飞,胡永芳,严坤,韩磊..具有紧凑结构的芯片声表面波拓扑延迟线设计与分析[J].传感技术学报,2024,37(9):1473-1477,5.
