光学精密工程2024，Vol.32Issue(17)：2591-2611,21.DOI:10.37188/OPE.20243217.2591
光栅干涉精密纳米测量技术
Grating interferometric precision nanometric measurement technology
摘要
Abstract
Grating interferometry is a crucial technology in precision nanometrology,valued for its high resolution,robustness,and adaptability for multi-axis measurement systems.It is essential in advanced semiconductor manufacturing and ultra-precision machine tools.This review first compares grating interfer-ometry with laser interferometry and time grating,detailing their applications and performance.It then ex-plains the two main principles:homodyne and heterodyne grating interferometry.The review also analyzes global development trends,highlighting key manufacturers and advancements in achieving nanometric to sub-nanometric precision in single and multi-axis systems.In addition,it examines error sources,classifica-tions,and compensation methods in grating interferometry.Finally,it discusses the current state and fu-ture prospects of grating interferometers,offering insights for developing and optimizing measurement sys-tems based on this technology.关键词
精密测量/纳米测量/光栅干涉仪/多自由度/误差补偿Key words
precision measurement/nano measurement/grating interferometer/multiple degrees of free-dom/error compensation分类
机械工程引用本文复制引用
李星辉,崔璨..光栅干涉精密纳米测量技术[J].光学精密工程,2024,32(17):2591-2611,21.基金项目
广东省基础与应用基础研究基金资助项目(No.2021B1515120007) （No.2021B1515120007）
深圳市稳定支持计划项目(No.WDZC20231124201906001) （No.WDZC20231124201906001）
国家自然科学基金资助项目(No.62275142) （No.62275142）
