光学精密工程2024，Vol.32Issue(17)：2625-2634,10.DOI:10.37188/OPE.20243217.2625
宽频段振动干扰不敏感的白光干涉测量
White-light interferometry immune to vibration disturbance over wide frequency region
摘要
Abstract
The traditional white-light interferometer is highly sensitive to vibrations,causing scanning step errors and reducing measurement accuracy.To address this,a three-point arcsine(3P-Asin)algorithm is proposed.This method divides WLI interferograms into groups of three adjacent frames,with overlap be-tween groups.By analyzing fringe movement,the phase shift deviation and exact scanning step are deter-mined.Using this step,a least-squares method calculates phase and modulation for non-equal step scan-ning to reconstruct surface height.The 3P-Asin algorithm detects fast and large scanning step errors using only three interferograms,with no approximation.Simulations and experiments show it achieves an accura-cy of 0.5%for a 10 μm step height and adapts to various surfaces in mechanical machining.Both theoreti-cal and experimental results demonstrate that the 3P-Asin algorithm effectively attenuates scanning step er-rors across a wide frequency range,making it suitable for WLI in vibrating environments.关键词
表面形貌测量/白光干涉测量/粗糙度/振动Key words
topography measurement/white-light interferometry/roughness/vibration分类
机械工程引用本文复制引用
刘乾,密乐,黄小津..宽频段振动干扰不敏感的白光干涉测量[J].光学精密工程,2024,32(17):2625-2634,10.基金项目
国防科工局技术基础科研项目(No.JSZL2022212B001) （No.JSZL2022212B001）
