光学精密工程2024，Vol.32Issue(17)：2654-2662,9.DOI:10.37188/OPE.20243217.2654
基于激光干涉的多轴运动平台垂直度测量
Perpendicularity measurement of multi-axis motion platform based on laser interferometry
摘要
Abstract
Perpendicularity error is a critical geometric error in multi-axis motion platforms,indicating the vertical deviation of machine tool components during movement.This deviation significantly affects spatial positioning errors,particularly as the stroke length of the moving axis increases.Various methods exist for measuring perpendicularity error,including physical gauges,volumetric measurements,CCD measure-ments,planar gratings,laser trackers,and laser interferometry.However,these methods often suffer from drawbacks such as operational inconvenience,high costs,or inability to perform online measure-ments.This paper presents a multi-axis laser interferometric device for measuring perpendicularity,utiliz-ing components like laser emitters,pentagonal beam splitters,prisms,straightness interferometers,and reflectors.With a well-designed optical path,this device can be integrated into the multi-axis motion plat-form,enabling efficient and precise online measurement of perpendicularity.A comparison test against a granite protractor showed a deviation of 1.4″ and a normalized deviation En<1,confirming the method's feasibility and accuracy.关键词
计量学/激光干涉仪/垂直度/多轴Key words
metrology/laser interferometry/perpendicularity/multi-axis引用本文复制引用
罗凯元,郑文炜,杨霖..基于激光干涉的多轴运动平台垂直度测量[J].光学精密工程,2024,32(17):2654-2662,9.基金项目
国家重点研发计划项目(No.2022YFF0606000) （No.2022YFF0606000）
