基于激光干涉的多轴运动平台垂直度测量OA北大核心CSTPCD

Perpendicularity error is a critical geometric error in multi-axis motion platforms,indicating the vertical deviation of machine tool components during movement.This deviation significantly affects spatial positioning errors,particularly as the stroke length of the moving axis increases.Various methods exist for measuring perpendicularity error,including physical gauges,volumetric measurements,CCD measure-ments,planar gratings,laser trackers,and laser interferometry.However,these methods often suffer from drawbacks such as operational inconvenience,high costs,or inability to perform online measure-ments.This paper presents a multi-axis laser interferometric device for measuring perpendicularity,utiliz-ing components like laser emitters,pentagonal beam splitters,prisms,straightness interferometers,and reflectors.With a well-designed optical path,this device can be integrated into the multi-axis motion plat-form,enabling efficient and precise online measurement of perpendicularity.A comparison test against a granite protractor showed a deviation of 1.4″ and a normalized deviation En<1,confirming the method's feasibility and accuracy.