光学精密工程2024，Vol.32Issue(17)：2676-2685,10.DOI:10.37188/OPE.20243217.2676
激光准直测量中的空气随机扰动影响抑制
Suppression of effects of air random disturbances in laser collimation measurements
摘要
Abstract
The highly directional laser collimated beam is extensively used as a linear measurement refer-ence in precision measurement.However,random air disturbances like fluctuations in temperature,humid-ity,and atmospheric pressure can induce jitter,compromising stability and accuracy.This paper introduces a method to counteract these disturbances by using Empirical Mode Decomposition(EMD)combined with Least Squares(LS)fitting for laser collimation signal filtering.The developed signal processing scheme de-composes,reconstructs,and corrects laser signals to remove such interferences.Experiments under vari-ous disturbance conditions show that the method proposed results in a standard deviation of fluctuations of 0.01 μm in the horizontal direction and 0.02 μm in the vertical direction after processing the laser alignment signal following laser drift compensation,significantly improves the stability of laser collimation measure-ments affected by atmospheric randomness.关键词
激光准直/直线基准/空气扰动/经验模态分解Key words
laser collimation/linear datum/air disturbances/empirical mode decomposition分类
电子信息工程引用本文复制引用
刁宽,刘晓军,赵海煜..激光准直测量中的空气随机扰动影响抑制[J].光学精密工程,2024,32(17):2676-2685,10.基金项目
国家科学挑战专题资助项目(No.2018006-0102-02) （No.2018006-0102-02）
