红外技术2024，Vol.46Issue(10)：1138-1144,7.
一种新型偏振-微光EMCCD传感器研制
Development of a Novel Polarization Low-light EMCCD Sensor
摘要
Abstract
The development of image sensors has made it necessary to detect more dimensions of image information.Hence,a new polarization low-light structure was designed to solve the problem in which polarization units cannot be imaged under low-illumination conditions.The introduction of this new structural unit significantly improves the imaging quality of the device under low illumination and light conditions.We completed the production process of a polarized low-light structure and utilized multiple high-energy ion implantation and high-temperature annealing to form a saddle-shaped,"p"-shaped,longitudinal antiblooming structure to achieve the halo suppression of EMCCD devices.Finally,the imaging performance of the device was analyzed,and it was found that the imaging quality of the device hardly decreased under low-illumination conditions,while sufficient polarization information was obtained to achieve polarization detection of the target.This new polarized low-light structure enables image sensors to detect multidimensional information from targets under low-illumination and low-light conditions.关键词
EMCCD/偏振/微光/抗光晕Key words
EMCCD/polarization/low light/antiblooming分类
电子信息工程引用本文复制引用
顾子悦,那启跃,徐建东,沈吉,常维静..一种新型偏振-微光EMCCD传感器研制[J].红外技术,2024,46(10):1138-1144,7.基金项目
科技创新2030-"新一代人工智能"重大项目(2018AAA0103100) （2018AAA0103100）
